Universal CVD Systems
The systems includes a CVD furnace with dual heating zones, a mixed gas module controlled by mass flow meters and a vacuum module. The system connects with stainless steel flanges and sealed with high temperature "O" rings. The furnace sits on sliding rails for easy to move to facilitate fast cooling. The gas module is able to mix up the four gas sources which are monitored by mass flow meters. Equipped with a two-stage rotary vacuum pump, the system can reach high vacuum up to 5x10-1 torr.